Trace Detection of Halogen Acids

This analyzer specializes in monitoring hydrogen fluoride (HF) and Hydrogen Chloride (HCl) impurities down to sub-ppb levels in specialty gases, as well as common inert bulk gases. High sensitivity, fast speed of response and maximum ease of use make these analyzers ideal for detecting trace HF & HCl in various industrial and research applications. The application for these analyzers include but not limited to:

  • UHP Gas quality control
  • Gas standard preparation
  • CEM standard preparation
  • Fuel-cell hydrogen analysis
  • Research & development
  • High-purity gas systems
  • Gas mixtures
  • Fluorocarbon chemistry
  • Semiconductor specialty gas

Detection of HF

Trace HF Detection CRDS Analyzer

HF in N2

0-5 ppm

HF in He

0-13 ppm

HF in NH3

0-8 ppm

HF in SF6

0-7.5 ppm

HF in CF4

0-6 ppm

Detection of HCl

Trace HF Detection CRDS Analyzer

HCl in N2

0-20 ppm

HCl in H2

0 -10 ppm

HCl in CDA

0-20 ppm

Measurement and Analytics

Trace Composition Measurement

Our specialized analyzers with advanced CRDS technology provide users with unmatched reliability, accuracy, speed of response, and ease of operation. Featuring our Cavity Ring Down Spectroscopy in a very compact & economical design, these versatile analyzers allow trace measurement of HCl, H2O, NH3, CO2, CO and many others in specialty as well as common inert bulk gases and in most advanced semiconductor fabrications.

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